Epitaxial Reactor Technician
Leonardo Electronics US Inc
- Tucson, AZ
- Permanent
- Full-time
- Setup and Operation: Setting-up and operating computer-controlled epitaxial reactors. These tasks begin with daily checks of the reactor gauges, electronics rack, pumps, and reactor room, recorded on an SPC tracker. The Epitaxial Reactor Technician reviews and runs the recipes and recipe lots written up by the Epitaxial Engineers, then updates run logs. Initiates Run Cards, updates enterprise resource planning (ERP) software, and advises on job completions. Reactors include a Veeco GEN2000, Veeco GEN200s, and smaller reactors modified for epitaxial-mirror-on-facet (EMOF).
- Process Monitoring: Entering processing data into the computer and monitoring the process via display screens, including trend data and residual gas analyzer feeds. Trend data of completed growths are reviewed and SPC data entered in growth trackers, any deviations are immediately reported to the Epitaxial Engineer and/or Epitaxial Manager.
- Wafer Handling: Safely handles and tracks wafer movement before and after epitaxial growth. In the growth planning stage this involves selecting, labeling, and loading Epitaxial Engineer designated substrate wafers on the reactor platen, then ensuring substrates are outgassed in the load-lock and prep chamber before growth. On completed growths, labels wafer pucks with run data, unload and inspects wafers, and transports wafers to wafer characterization.
- Wafer Characterization: Characterizes all wafers, enters results into tracking software and forms, and reports on pass/fail results including any deviations from control or spec limits. Wafer characterization includes Surfscan, XRD (x-ray diffraction), PL (photoluminescence), ECV (electrochemical capacitance-voltage), ellipsometry, and 4-point probe (Hall).
- Maintenance: Tracks routing maintenance requirements and works with epitaxial engineers and UHV technicians to ensure on-time compliance. Tasks will include monitoring the status of facilities and accessory equipment on a weekly SPC tracker and reporting any deviations and tracking time/growths dependent preventative maintenance requirements such as load-lock cleaning, platen cleaning, 5S/FOD compliance, and cryopump regeneration. Assists UHV Technicians and Epitaxial Engineers with minor troubleshooting and repair, as well as major vent maintenance tasks.
- Data Analysis and Recipe Design: Working closely with an Epitaxial Engineer, the Epitaxial Reactor Technician will be provided opportunities to take on advanced roles in the wafer growth process, including writing and designing recipes and analyzing growth and characterization data.
- This role requires an associate's degree and/or a minimum of 5 years' experience with semiconductor wafers and wafer processing equipment.
- The first year will involve extensive on-site training, with a focus on reactor theory, operations, safety, and instrumentation control.